Abstract: Results of theoretical estimations and measurements of characteristics of an Andreev reflection hot-electron microbolometer for submillimeter radioastronomy made by different researchers are reviewed and analysed. Peculiarities and characteristics of the microbolometers using two types of microthermometer for measurement of the electron temperature increment under influence of the radiation: the SIN-junction and the transition-edge sensor (TES) with electrothermal feedback – are compared. Advantages of the microbolometer with the second type of the microthermometer when the TES is used simultaneously as the absorber of radiation are shown. Methods of achievement of the best noise equivalent power of the microbolometer in such version as well as methods of the matching the microbolometer with the incident radiation flow using planar antennas and with the channel of output signal measurement using a SQUID-picoammeter are considered.

Abstract: Antenna-coupled microbolometers use planar lithographic antennas to couple infrared radiation into a bolometer with sub-micron dimensions. In this paper four different types of infrared antennas were fabricated on thin grounded-substrates and coupled to microbolometers. Dipole, bowtie, spiral and log-periodic IR antenna-coupled detectors were measured at 10.6 μm and their performance compared. A new method to calculate the radiation efficiency based on the spatial and angular response of infrared antennas is presented and used to evaluate their performance. The calculated radiation efficiency for the dipole, bowtie, spiral and log-periodic IR antennas was 20%, 37%, 25% and 46% respectively. A dipole-length study was performed and shows that the quasistatic value of the effective permittivity accurately describes the incident wavelength in the substrate at infrared frequencies for antennas on a thin substrate.

Abstract: The thesis reports the development of Hot Electron Bolometer (HEB) mixers for radio astronomy heterodyne receivers in THz frequency range. Part of this work is the fabrication of HEB devices, which are based on NbN or NbTiN superconducting thin films (â‰<a4>5 nm). They are integrated with wideband spiral or double-slot planar antennas. The mixer chips are incorporated into a quasi-optical receiver. The experimental part of this work focuses on the characterization of the receiver as a whole, and the HEB mixers as a part. Double side band receiver noise temperature and the IF bandwidth are reported for frequencies from 0.7 THz up to 2.6 THz. The spectrum of the direct response of HEB integrated with dierent antennas are measured using Fourier Transform Spectrometer (FTS). The effect of the bolometer size on total receiver performance and the LO power requirements is also discussed. A high-yield and reliable process for fabrication of NbN HEB mixers have been achieved. Over 100 devices with different bolometer geometry, film property and also different antennas have been fabricated and measured. The measured data enables us to discuss the impact of different parameters to the receiver overall performance.
This work has provided NbN HEB mixers to the following receivers:
TREND (Terahertz REceiver with NbN HEB Device) operating at 1.25-1.5 THz, installed in AST/RO Submillimeter Wave Telescope, Amundsen/Scott South Pole Station, in 2002-2003.
Band 6-low (1.410-1.700 THz) and 6-high (1.700-1.920 THz) of the HIFI (Heterodyne Instrument for Far Infra-red) in the Herschel Space Observatory, due to launch in 2007 by ESA (European Space Agency).
Besides, there has been continuous efforts to develop better models to explain the mixer performance more accurately. They are based on two temperature model for electrons and phonons and solving one-dimensional heat balance equations along the bolometer. The principles of these models are illustrated and the calculated results are compared with measured data.

Abstract: We report the results of our study of the input bandwidth of hot electron bolometers (HEB) embedded into the planar log-spiral antenna. The sensitive element is made of the ultrathin superconducting NbN film patterned as a bridge at the feed of the antenna. The contacts between the antenna and a sensitive element are made from in situ deposited gold (i.e., deposited over NbN film without breaking vacuum), which gives high quality contacts and makes the response of the HEB at higher frequencies less affected by the RF loss. An accurate experimental spectroscopic procedure is demonstrated that leads to the confirmation of the wide ( 8 THz) bandwidth in this antenna coupled device.

Abstract: We report on the bandwidth performance of the normal metal TiN bolometer-mixer on top of an Al 2 O 3 substrate, which is capable to operate in a wide range of bath temperatures from 77 K – 300 K. The choice of the combination TiN / Al 2 O 3 is related to an advanced heat transport between the film and the substrate in this pair and the sufficient temperature coefficient of resistance. The data were taken at 132.5 – 145.5 GHz with two BWOs as a signal and an LO source. Measurements were taken on TiN films of different thickness starting from 20 nm down to 5 nm coupled into a spiral Au antenna, which improves matching of incoming radiation with the thin TiN fim. Our experiments demonstrate effective heat coupling from a TiN thin film to an Al 2 O 3 substrate (111) boosting gain bandwidth (GB) of TiN bolometer up to 6 GHz for 5 nm thin film. Current results indicate weak temperature dependence of GB on the bath temperature of the TiN bolometer. Theoretical estimations of GB performance meet with experimental data for 5 nm thin TiN films.