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Abstract |
Antenna-coupled microbolometers use planar lithographic antennas to couple infrared radiation into a bolometer with sub-micron dimensions. In this paper four different types of infrared antennas were fabricated on thin grounded-substrates and coupled to microbolometers. Dipole, bowtie, spiral and log-periodic IR antenna-coupled detectors were measured at 10.6 μm and their performance compared. A new method to calculate the radiation efficiency based on the spatial and angular response of infrared antennas is presented and used to evaluate their performance. The calculated radiation efficiency for the dipole, bowtie, spiral and log-periodic IR antennas was 20%, 37%, 25% and 46% respectively. A dipole-length study was performed and shows that the quasistatic value of the effective permittivity accurately describes the incident wavelength in the substrate at infrared frequencies for antennas on a thin substrate. |
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