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Елманов, И. А.; Елманова, А. В.; Голиков, А. Д.; Комракова, С. А.; Каурова, Н. С.; Ковалюк, В. В.; Гольцман, Г. Н. |
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Способ определения параметров резистов для электронной литографии фотонных интегральных схем на платформе нитрида кремния |
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Conference Article |
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2019 |
Publication |
Proc. IWQO |
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Proc. IWQO |
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306-308 |
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Si3N4, e-beam lithography, EBL |
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В работе были измерены толщины резистов ZEP 520A и ma-N 2400 для электронно-лучевой литографии, неразрушающим способом, а также подобран рецепт, обеспечивающий высокое отношение скорости травления нитрида кремния по сравнению с резистом. Работа имеет практическое значение для электронной литографии интегрально-оптических устройств и устройств нанофотоники на основе нитрида кремния. |
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Duplicated as 1189 |
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no |
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1284 |
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Елманова, А.; Елманов, И.; Комракова, С.; Голиков, А.; Джавадзадэ, Д.; Воробьёв, В.; Большедворский, С.; Сошенко, В.; Акимов, А.; Ковалюк, В.; Гольцман, Г. |
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Способ интеграции наноалмазов с нанофотонными устройствами из нитрида кремния |
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Conference Article |
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2019 |
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Proc. IWQO |
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Proc. IWQO |
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309-311 |
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nanodiamonds, NV-centers |
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В работе были разработаны оптические структуры из нитрида кремния для дальнейшего размещения на них наноалмазов с NV-центрами, опробованы различные методики нанесения раствора наноалмазов и выбрана оптимальная. Работа имеет практическое значение в области нанофотоники и создании квантово-оптических устройств с однофотонными источниками. |
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Duplicated as 1190 |
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1285 |
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Goltsman, G. |
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Quantum-photonic integrated circuits |
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Conference Article |
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2019 |
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Proc. IWQO |
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Proc. IWQO |
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22-23 |
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WSSPD, waveguide SSPD, SNSPD, quantum optics, integrated optics, superconducting nanowire single-photon detector |
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We show the design, a history of development as well as the most successful and promising approaches for QPICs realization based on hybrid nanophotonic-superconducting devices, where one of the key elements of such a circuit is a waveguide integrated superconducting single-photon detector (WSSPD). The potential of integration with fluorescent molecules is discussed also. |
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1287 |
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Nagatsuma, T.; Hirata, A.; Royter, Y.; Shinagawa, M.; Furuta, T.; Ishibashi, T.; Ito, H. |
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A 120-GHz integrated photonic transmitter |
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2000 |
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Proc. International topical meeting on microwave photonics (MWP 2000) |
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225 - 228 |
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THz, teraherts communications, terahertz communication channel, photodiode, transmitter |
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A photonics-based 120-GHz transmitter has been developed. A photodiode, a planar antenna and a silicon lens were integrated to form a compact millimeter-wave (MMW) emitter. The MMW signal emitted from the transmitter has been detected with a waveguide-mounted Schottky diode. The received power exceeded 100 μW, which is the highest value ever reported for photonic MMW transmitter at frequencies of >100 GHz |
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595 |
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Semenov, A. D.; Hübers, H.-W.; Gol’tsman, G. N.; Smirnov, K. |
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Superconducting quantum detector for astronomy and X-ray spectroscopy |
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Conference Article |
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2002 |
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Proc. Int. Workshop on Supercond. Nano-Electronics Devices |
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Proc. Int. Workshop on Supercond. Nano-Electronics Devices |
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201-210 |
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NbN SSPD, SNSPD, SQD, superconducting quantum detectors, X-ray spectroscopy |
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We propose the novel concept of ultra-sensitive energy-dispersive superconducting quantum detectors prospective for applications in astronomy and X-ray spectroscopy. Depending on the superconducting material and operation conditions, such detector may allow realizing background limited noise equivalent power 10−21 W Hz−1/2 in the terahertz range when exposed to 4-K background radiation or counting of 6-keV photon with almost 10—4 energy resolution. Planar layout and relatively simple technology favor integration of elementary detectors into a detector array. |
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Naples, Italy |
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Springer |
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Boston, MA |
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Pekola, J.; Ruggiero, B.; Silvestrini, P. |
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978-1-4615-0737-6 |
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International Workshop on Superconducting Nano-Electronics Devices, May 28-June 1, 2001 |
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semenov2002superconducting |
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1525 |
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