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Author  |
Yang, J.K.W.; Kerman, A.J.; Dauler, E.A.; Cord, B.; Anant, V.; Molnar, R.J.; Berggren, K.K. | ||||
| Title | Suppressed critical current in superconducting nanowire single-photon detectors with high fill-factors | Type | Journal Article | ||
| Year | 2009 | Publication | IEEE Trans. Appl. Supercond. | Abbreviated Journal | |
| Volume | 19 | Issue | 3 | Pages | 318-322 |
| Keywords | SNSPD | ||||
| Abstract | In this work we present a new fabrication process that enabled the fabrication of superconducting nanowire single photon detectors SNSPD with fill-factors as high as 88% with gaps between nanowires as small as 12 nm. This fabrication process combined high-resolution electron-beam lithography with photolithography. Although this work was motivated by the potential of increased detection efficiency with higher fill-factor devices, test results showed an unexpected systematic suppression in device critical currents with increasing fill-factor. | ||||
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| Notes | Approved | no | |||
| Call Number | RPLAB @ gujma @ | Serial | 677 | ||
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