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	Author	Yang, J.K.W.; Kerman, A.J.; Dauler, E.A.; Cord, B.; Anant, V.; Molnar, R.J.; Berggren, K.K.
	Title	Suppressed critical current in superconducting nanowire single-photon detectors with high fill-factors			Type	Journal Article
	Year	2009	Publication	IEEE Trans. Appl. Supercond.	Abbreviated Journal
	Volume	19	Issue	3	Pages	318-322
	Keywords	SNSPD
	Abstract	In this work we present a new fabrication process that enabled the fabrication of superconducting nanowire single photon detectors SNSPD with fill-factors as high as 88% with gaps between nanowires as small as 12 nm. This fabrication process combined high-resolution electron-beam lithography with photolithography. Although this work was motivated by the potential of increased detection efficiency with higher fill-factor devices, test results showed an unexpected systematic suppression in device critical currents with increasing fill-factor.
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	Notes				Approved	no
	Call Number	RPLAB @ gujma @			Serial	677
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