| Records |
Author  |
Zolotov, P. I.; Divochiy, A. V.; Vakhtomin, Y. B.; Morozov, P. V.; Seleznev, V. A.; Smirnov, K. V. |
| Title |
Development of high-effective superconducting single-photon detectors aimed for mid-IR spectrum range |
Type |
Conference Article |
| Year |
2017 |
Publication |
J. Phys.: Conf. Ser. |
Abbreviated Journal |
J. Phys.: Conf. Ser. |
| Volume |
917 |
Issue |
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Pages |
062037 |
| Keywords |
NbN SSPD, SNSPD |
| Abstract |
We report on development of superconducting single-photon detectors (SSPD) with high intrinsic quantum efficiency in the wavelength range 1.31 – 3.3 μm. By optimization of the NbN film thickness and its compound, we managed to improve detection efficiency of the detectors in the range up to 3.3 μm. Optimized devices showed intrinsic quantum efficiencies as high as 10% at mid-IR range. |
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| ISSN |
1742-6588 |
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1233 |
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| Author |
Zolotov, P. I.; Vakhtomin, Yu. B.; Divochiy, A. V.; Seleznev, V. A.; Smirnov, K. V. |
| Title |
Technology development of resonator-based structures for efficiency increasing of NBN detectors of IR single photons |
Type |
Journal Article |
| Year |
2016 |
Publication |
Proc. 5th Int. Conf. Photonics and Information Optics |
Abbreviated Journal |
Proc. 5th Int. Conf. Photonics and Information Optics |
| Volume |
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Issue |
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Pages |
115-116 |
| Keywords |
NbN SSPD |
| Abstract |
This paper presents a technology of fabrication of NbN superconductive single- photon detectors, using resonator structures. The main results are related to optimization of the process of NbN sputtering over substrate with metallic mirrors and SiO 2 /Si 3 N 4 layers /4 thick. Investigation of the quantum efficiency of fabricated devices at 1.6 K on 1.55 μm showed triple-magnified value compared to standard Si/NbN structures. |
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| Language |
Russian |
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978-5-7262-2215-8 |
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| Notes |
http://fioconf.mephi.ru/files/2015/12/FIO2016-Sbornik.pdf Разработка технологии создания резонаторных структур для увеличения квантовой эффективности NBN детекторов ИК-фотонов |
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Serial |
1811 |
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