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Author  |
Zolotov, P. I.; Vakhtomin, Yu. B.; Divochiy, A. V.; Seleznev, V. A.; Smirnov, K. V. | ||||
| Title | Technology development of resonator-based structures for efficiency increasing of NBN detectors of IR single photons | Type | Journal Article | ||
| Year | 2016 | Publication | Proc. 5th Int. Conf. Photonics and Information Optics | Abbreviated Journal | Proc. 5th Int. Conf. Photonics and Information Optics |
| Volume | Issue | Pages | 115-116 | ||
| Keywords | NbN SSPD | ||||
| Abstract | This paper presents a technology of fabrication of NbN superconductive single- photon detectors, using resonator structures. The main results are related to optimization of the process of NbN sputtering over substrate with metallic mirrors and SiO 2 /Si 3 N 4 layers /4 thick. Investigation of the quantum efficiency of fabricated devices at 1.6 K on 1.55 μm showed triple-magnified value compared to standard Si/NbN structures. | ||||
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| Language | Russian | Summary Language | Original Title | ||
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| ISSN | ISBN | 978-5-7262-2215-8 | Medium | ||
| Area | Expedition | Conference | |||
| Notes | http://fioconf.mephi.ru/files/2015/12/FIO2016-Sbornik.pdf Разработка технологии создания резонаторных структур для увеличения квантовой эффективности NBN детекторов ИК-фотонов | Approved | no | ||
| Call Number | Serial | 1811 | |||
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