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	Author	Romanov, N. R.; Zolotov, P. I.; Smirnov, K. V.
	Title	Development of disordered ultra-thin superconducting vanadium nitride films			Type	Conference Article
	Year	2019	Publication	Proc. 8th Int. Conf. Photonics and Information Optics	Abbreviated Journal	Proc. 8th Int. Conf. Photonics and Information Optics
	Volume		Issue		Pages	425-426
	Keywords	VN films
	Abstract	We present the results of development and research of superconducting vanadium nitride VN films ~10 nm thick having different level of disorder. It is showed that both silicon substrate temperature T sub in process of magnetron sputtering and total gas pressure P affect superconducting transition temperature of sputtered films and R 300 /R 20 ratio defining their level of disorder. VN films suitable for development of superconducting single-photon detectors on their basis are obtained.
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	Corporate Author				Thesis
	Publisher		Place of Publication		Editor
	Language	Russian	Summary Language		Original Title
	Series Editor		Series Title		Abbreviated Series Title
	Series Volume		Series Issue		Edition
	ISSN		ISBN	978-5-7262-2536-4	Medium
	Area		Expedition		Conference
	Notes	http://fioconf.mephi.ru/files/2018/12/FIO2019-Sbornik.pdf			Approved	no
	Call Number				Serial	1802
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