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Yamashita, T., Miki, S., Qiu, W., Fujiwara, M., Sasaki, M., & Wang, Z. (2010). Temperature dependent performances of superconducting nanowire single-photon detectors in an ultralow-temperature region. IEEE Trans. Appl. Supercond., 21(3), 336–339.
Abstract: We report on the performance of a fiber-coupled superconducting nanowire single-photon detector (SNSPD) from 4 K down to the ultralow temperature of 16 mK for a 1550 nm wave length. The system detection efficiency (DE) increased with de creasing the temperature and reached the considerably high value of 15% with a dark count rate less than 100 cps below 1.5 K, even without an optical cavity structure. We also observed saturation of the system DE in its bias current dependency at 16 mK, which indicates that the device DE of our SNSPD nearly reached intrinsic DE despite the device having a large active area of 20 μm × 20 μm. The dark count was finite even at 16 mK and the black body radiation becomes its dominant origin in the low temperatures for fiber-coupled devices.
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Yang, J. K. W., Kerman, A. J., Dauler, E. A., Cord, B., Anant, V., Molnar, R. J., et al. (2009). Suppressed critical current in superconducting nanowire single-photon detectors with high fill-factors. IEEE Trans. Appl. Supercond., 19(3), 318–322.
Abstract: In this work we present a new fabrication process that enabled the fabrication of superconducting nanowire single photon detectors SNSPD with fill-factors as high as 88% with gaps between nanowires as small as 12 nm. This fabrication process combined high-resolution electron-beam lithography with photolithography. Although this work was motivated by the potential of increased detection efficiency with higher fill-factor devices, test results showed an unexpected systematic suppression in device critical currents with increasing fill-factor.
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Yang, J. K. W., Dauler, E., Ferri, A., Pearlman, A., Verevkin, A., Gol’tsman, G., et al. (2005). Fabrication development for nanowire GHz-counting-rate single-photon detectors. IEEE Trans. Appl. Supercond., 15(2), 626–630.
Abstract: We have developed a fabrication process for GHz-counting-rate, single-photon, high-detection-efficiency, NbN, nanowire detectors. We have demonstrated two processes for the device patterning, one based on the standard polymethylmethacrylate (PMMA) organic positive-tone electron-beam resist, and the other based on the newer hydrogen silsesquioxane (HSQ) negative-tone spin-on-glass resist. The HSQ-based process is simple and robust, providing high resolution and the prospect of high fill-factors. Initial testing results show superconductivity in the films, and suggest that the devices exhibit photosensitivity.
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Zhang, J., Boiadjieva, N., Chulkova, G., Deslandes, H., Gol'tsman, G. N., Korneev, A., et al. (2003). Noninvasive CMOS circuit testing with NbN superconducting single-photon detectors. Electron. Lett., 39(14), 1086–1088.
Abstract: The 3.5 nm thick-film, meander-structured NbN superconducting single-photon detectors have been implemented in the CMOS circuit-testing system based on the detection of near-infrared photon emission from switching transistors and have significantly improved the performance of the system. Photon emissions from both p- and n-MOS transistors have been observed.
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Zhang, J., Pearlman, A., Slysz, W., Verevkin, A., Sobolewski, R., Okunev, O., et al. (2003). Infrared picosecond superconducting single-photon detectors for CMOS circuit testing. In CLEO/QELS (Cmv4). Optical Society of America.
Abstract: Novel, NbN superconducting single-photon detectors have been developed for ultrafast, high quantum efficiency detection of single quanta of infrared radiation. Our devices have been successfully implemented in a commercial VLSI CMOS circuit testing system.
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Zhang, J., Pearlman, A., Slysz, W., Verevkin, A., Sobolewski, R., Wilsher, K., et al. (2003). A superconducting single-photon detector for CMOS IC probing. In Proc. 16-th LEOS (Vol. 2, pp. 602–603).
Abstract: In this paper, a novel, time-resolved, NbN-based, superconducting single-photon detector (SSPD) has been developed for probing CMOS integrated circuits (ICs) using photon emission timing analysis (PETA).
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Zhang, J., Słysz, W., Pearlman, A., Verevkin, A., Sobolewski, R., Okunev, O., et al. (2003). Time delay of resistive-state formation in superconducting stripes excited by single optical photons. Phys. Rev. B, 67(13), 132508 (1 to 4).
Abstract: We have observed a 65(±5)-ps time delay in the onset of a resistive-state formation in 10-nm-thick, 130-nm-wide NbN superconducting stripes exposed to single photons. The delay in the photoresponse decreased to zero when the stripe was irradiated by multi-photon (classical) optical pulses. Our NbN structures were kept at 4.2 K, well below the material’s critical temperature, and were illuminated by 100-fs-wide optical pulses. The time-delay phenomenon has been explained within the framework of a model based on photon-induced generation of a hotspot in the superconducting stripe and subsequent, supercurrent-assisted, resistive-state formation across the entire stripe cross section. The measured time delays in both the single-photon and two-photon detection regimes agree well with theoretical predictions of the resistive-state dynamics in one-dimensional superconducting stripes.
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Zhang, J., Verevkin, A., Slysz, W., Chulkova, G., Korneev, A., Lipatov, A., et al. (2017). Time-resolved characterization of NbN superconducting single-photon optical detectors. In J. C. Armitage (Ed.), Proc. SPIE (Vol. 10313, 103130F (1 to 3)). SPIE.
Abstract: NbN superconducting single-photon detectors (SSPDs) are very promising devices for their picosecond response time, high intrinsic quantum efficiency, and high signal-to-noise ratio within the radiation wavelength from ultraviolet to near infrared (0.4 gm to 3 gm) [1-3]. The single photon counting property of NbN SSPDs have been investigated thoroughly and a model of hotspot formation has been introduced to explain the physics of the photon- counting mechanism [4-6]. At high incident flux density (many-photon pulses), there are, of course, a large number of hotspots simultaneously formed in the superconducting stripe. If these hotspots overlap with each other across the width w of the stripe, a resistive barrier is formed instantly and a voltage signal can be generated. We assume here that the stripe thickness d is less than the electron diffusion length, so the hotspot region can be considered uniform. On the other hand, when the photon flux is so low that on average only one hotspot is formed across w at a given time, the formation of the resistive barrier will be realized only when the supercurrent at sidewalks surpasses the critical current (jr) of the superconducting stripe [1]. In the latter situation, the formation of the resistive barrier is associated with the phase-slip center (PSC) development. The effect of PSCs on the suppression of superconductivity in nanowires has been discussed very recently [8, 9] and is the subject of great interest.
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Zhang, J., Slysz, W., Verevkin, A., Okunev, O., Chulkova, G., Korneev, A., et al. (2003). Response time characterization of NbN superconducting single-photon detectors. IEEE Trans. Appl. Supercond., 13(2), 180–183.
Abstract: We report our time-resolved measurements of NbN-based superconducting single-photon detectors. The structures are meander-type, 10-nm thick, and 200-nm wide stripes and were operated at 4.2 K. We have shown that the NbN devices can count single-photon pulses with below 100-ps time resolution. The response signal pulse width was about 150 ps, and the system jitter was measured to be 35 ps.
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Zinoni, C., Alloing, B., Li, L. H., Marsili, F., Fiore, A., Lunghi, L., et al. (2007). Single-photon experiments at telecommunication wavelengths using nanowire superconducting detectors. Appl. Phys. Lett., 91(3), 031106 (1 to 3).
Abstract: The authors report fiber-coupled superconducting single-photon detectors with specifications that exceed those of avalanche photodiodes, operating at telecommunication wavelength, in sensitivity, temporal resolution, and repetition frequency. The improved performance is demonstrated by measuring the intensity correlation function g(2)(τ) of single-photon states at 1300nm produced by single semiconductor quantum dots.
This work was supported by Swiss National Foundation through the “Professeur borsier” and NCCR Quantum Photonics program, FP6 STREP “SINPHONIA” (Contract No. NMP4-CT-2005-16433), IP “QAP” (Contract No. 15848), NOE “ePIXnet,” and the Italian MIUR-FIRB program.
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Zinoni, C., Alloing, B., Li, L. H., Marsili, F., Fiore, A., Lunghi, L., et al. (2007). Single-photonics at telecom wavelengths using nanowire superconducting single photon detectors. In CLEO/QELS (QTuF6 (1 to 2)). Optical Society of America.
Abstract: Novel single-photon detectors based on NbN superconducting nanostructures promise orders-of- magnitude improvement over InGaAs APDs. We demonstrate this improved performance for the first time by measuring the g(2)(τ) on single photon states produced by a quantum dot at telecom wavelength.
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Zinoni, C., Alloing, B., Li, L. H., Marsili, F., Fiore, A., Lunghi, L., et al. (2010). Erratum: “Single photon experiments at telecom wavelengths using nanowire superconducting detectors” [Appl. Phys. Lett. 91, 031106 (2007)]. Appl. Phys. Lett., 96(8), 089901.
Abstract: A calculation error was made in the original publication of this letter. The error was in the calculation of the noise equivalent power (NEP) values for the avalanche photodiode detector (APD) and the superconducting single photon detector (SSPD), the incorrect values were plotted on the right axis in Fig. 1(b). The correct NEP values were calculated with the same equation reported in the original letter and the revised Fig. 1(b) is shown below. The other conclusions of the paper remain unaltered.
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Zolotov, P., Divochiy, A., Korneeva, Y., Vakhtomin, Y., Seleznev, V., & Smirnov, K. (2015). Capability investigation of superconducting single-photon detectors, optimized for 800–1200 nm spectrum range.
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Zolotov, P., Divochiy, A., Vakhtomin, Y., Moshkova, M., Morozov, P., Seleznev, V., et al. (2018). Photon-number-resolving SSPDs with system detection efficiency over 50% at telecom range. In Proc. AIP Conf. (Vol. 1936, 020019).
Abstract: We used technology of making high-efficiency superconducting single-photon detectors as a basis for improvement of photon-number-resolving devices. By adding optical cavity and using an improved NbN superconducting film, we enhanced previously reported system detection efficiency at telecom range for such detectors. Our results show that implementation of optical cavity helps to develop four-section device with quantum efficiency over 50% at 1.55 µm. Performed experimental studies of detecting multi-photon optical pulses showed irregularities over defining multi-photon through single-photon quantum efficiency.
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Zolotov, P., Semenov, A., Divochiy, A., & Goltsman, G. (2021). A comparison of VN and NbN thin films towards optimal SNSPD efficiency. IEEE Trans. Appl. Supercond., 31(5), 1–4.
Abstract: Based on early phenomenological ideas about the operation of superconducting single-photon detectors (SSPD or SNSPD), it was expected that materials with a lower superconducting gap should perform better in the IR range. The plausibility of this concept could be checked using two popular SSPD materials – NbN and WSi films. However, these materials differ strongly in crystallographic structure (polycrystalline B1 versus amorphous), which makes their dependence on disorder different. In our work we present a study of the single-photon response of SSPDs made from two disordered B1 structure superconductors – vanadium nitride and niobium nitride thin films. We compare the intrinsic efficiency of devices made from films with different sheet resistance values. While both materials have a polycrystalline structure and comparable diffusion coefficient values, VN films show metallic behavior over a wide range of sheet resistance, in contrast to NbN films with an insulator-like temperature dependence of resistivity, which may be partially due to enhanced Coulomb interaction, leading to different starting points for the normal electron density of states. The results show that even though VN devices are more promising in terms of theoretical predictions, their optimal performance was not reached due to lower values of sheet resistance.
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Zolotov, P., Vakhtomin, Y., Divochiy, A., Morozov, P., Seleznev, V., & Smirnov, K. (2017). Development of fast and high-effective single-photon detector for spectrum range up to 2.3 μm. In Proc. SPBOPEN (pp. 439–440).
Abstract: We present the results of development and testing of the single-photon-counting system operating in the wide spectrum rane up to 2.3 mcm. We managed to increase system detection efficiency up to 60% in the range of 1.7-2.3 mcm optimisation of the fabrication methods of superconducting single-photon detectors and application of the single-mode fiber with enlarged core diameter.
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Zolotov, P., Vakhtomin, Y., Divochiy, A., Seleznev, V., Morozov, P., & Smirnov, K. (2013). High-efficiency single-photon detectors based on NbN films.
Abstract: We present our resent results in development and testing of Superconducting Single-Photon Detectors (SSPD) with detection efficiencies greater than 85%. High values of obtained results are assigned to proposed design of the detector with integrated resonator structure, including two-layer optical cavity and anti-reflective coating (ARC).
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Zolotov, P. I., Divochiy, A. V., Vakhtomin, Y. B., Lubenchenko, A. V., Morozov, P. V., Shurkaeva, I. V., et al. (2018). Influence of sputtering parameters on the main characteristics of ultra-thin vanadium nitride films. In J. Phys.: Conf. Ser. (Vol. 1124, 051030).
Abstract: We researched the relation between deposition and ultra-thin VN films parameters. To conduct the experimental study we varied substrate temperature, Ar and N2 partial pressures and deposition rate. The study allowed us to obtain the films with close to the bulk values transition temperatures and implement such samples in order to fabricate superconducting single-photon detectors.
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Zolotov, P. I., Divochiy, A. V., Vakhtomin, Y. B., Morozov, P. V., Seleznev, V. A., & Smirnov, K. V. (2017). Development of high-effective superconducting single-photon detectors aimed for mid-IR spectrum range. In J. Phys.: Conf. Ser. (Vol. 917, 062037).
Abstract: We report on development of superconducting single-photon detectors (SSPD) with high intrinsic quantum efficiency in the wavelength range 1.31 – 3.3 μm. By optimization of the NbN film thickness and its compound, we managed to improve detection efficiency of the detectors in the range up to 3.3 μm. Optimized devices showed intrinsic quantum efficiencies as high as 10% at mid-IR range.
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Zolotov, P. I., Semenov, A. V., Divochiy, A. V., Goltsman, G. N., Romanov, N. R., & Klapwijk, T. M. (2021). Dependence of photon detection efficiency on normal-state sheet resistance in marginally superconducting films of NbN. IEEE Trans. Appl. Supercond., 31(5), 1–5.
Abstract: We present an extensive set of data on nanowire-type superconducting single-photon detectors based on niobium-nitride (NbN) to establish the empirical correlation between performance and the normal-state resistance per square. We focus, in particular, on the bias current, compared to the expected depairing current, needed to achieve a near-unity detection efficiency for photon detection. The data are discussed within the context of a model in which the photon energy triggers the movement of vortices i.e. superconducting dissipation, followed by thermal runaway. Since the model is based on the non-equilibrium theory for conventional superconductors deviations may occur, because the efficient regime is found when NbN acts as a marginal superconductor in which long-range phase coherence is frustrated.
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Елезов, М. С., Корнеев, А. А., Дивочий, А. В., & Гольцман, Г. Н. (2009). Сверхпроводящие однофотонные детекторы с разрешением числа фотонов. In Науч. сессия МИФИ (pp. 47–58).
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Золотов, Ф. И., Дивочий, А. В., Вахтомин, Ю. Б., Пентин, И. В., Морозов, П. В., Селезнев, В. А., et al. (2018). Применение тонких сверхпроводниковых пленок нитрида ванадия для изготовления счетчиков одиночных ИК-фотонов. In Сборн. науч. труд. VII международн. конф. по фотонике и информац. опт. (pp. 60–61).
Abstract: Получены первые результаты по применению сверхпроводниковых пленок нитрида ванадия (VN) для детекторов одиночных фотонов ИК-диапазона. Изучение сверхпроводниковых однофотонных детекторов (SSPD), изготовленных на основе ультратонких (~5 нм) пленок VN, показало возможность создания устройств с близкой к насыщению зависимостью квантовой эффективности от тока смещения детекторов в телекоммуникационном диапазоне длин волн. Также нами были исследованы кинетическая индуктивность изготовленных структур с различной длиной сверхпроводниковой полоски и времена релаксации электронов в тонких сверхпроводниковых пленках VN.
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Корнеев, А. А., Минаева, О., Рубцова, И., Милостная, И., Чулкова, Г., Воронов, Б., et al. (2005). Сверхпроводящий однофотонный детектор на основе ультратонкой пленки NbN. Квантовая электроника, 35(8), 698–700.
Abstract: Представлены результаты исследований сверхпроводящих однофотонных детекторов, изготовленных из ультратонкой пленки NbN. Развитие технологического процесса изготовления детекторов, а также снижение рабочей температуры до 2 К позволили существенно увеличить квантовую эффективность: для видимого света (λ = 0.56 мкм) она составила 30%–40%, т.е. достигла предела, определяемого коэффициентом поглощения пленки. С ростом длины волны квантовая эффективность экспоненциально падает, составляя ~20% на λ=1.55 мкм и ~0.02% на λ = 5 мкм. При скорости темнового счета ~10-4s-1 экспериментально измеренная эквивалентная мощность шума составила 1.5 × 10-20 Вт/Гц-1/2; в дальнейшем она может быть уменьшена до рекордно низкого значения 5 × 10-21 Вт/Гц-1/2. Временное разрешение детектора равно 30 пс.
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Корнеева, Ю. П., Трифонов, А. В., Вахтомин, Ю. Б., Смирнов, К. В., Корнеев, А. А., Рябчун, С. А., et al. (2012). Расчет согласующего оптического резонатора для сверхпроводникового нанополоскового детектора. Преподаватель ХХI век, (3), 225–227.
Abstract: В статье произведен расчет резонатора, предназначенного для согласования сверхпроводникового нанополоскового однофотонного детектора с оптическим сигналом. Показано, что для детектора, выполненного из пленки с типичным сопротивлением квадрата 500 Ом и коэффициентом заполнения 0.5 коэффициент согласования с излучением, поляризованным параллельно полоскам детектора, достигает величины около 60%.
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Мошкова, М. А., Дивочий, А. В., Морозов, П. В., Золотов, Ф. И., Вахтомин, Ю. Б., & Смирнов, К. В. (2018). Высокоэффективные NBN однофотонные детекторы с разрешением числа фотонов. In Сборн. науч. труд. VII международн. конф. по фотонике и информац. опт. (pp. 400–401).
Abstract: Разработаны и исследованы сверхпроводниковые однофотонные детекторы, способные к разрешению до 3-х фотонов в коротком импульсе излучения и имеющие квантовую эффективность детектирования одиночных фотонов ~60% на длине волны lambda=1.55 мкм. Проведенная модернизация технологии изготовления детекторов, позволила получить приемные устройства с мультифотонной квантовой эффективностью, приближающейся к расчетным значениям.
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Пентин, И. В., Смирнов, К. В., Вахтомин, Ю. Б., Смирнов, А. В., Ожегов, Р. В., Дивочий, А. В., et al. (2011). Быстродействующий терагерцевый приемник и инфракрасный счетчик одиночных фотонов на эффекте разогрева электронов в сверхпроводниковых тонкопленочных наноструктурах. Труды МФТИ, 3(2), 38–42.
Abstract: Представлены результаты создания приемных систем терагерцевого диапазона (0.3-70 ТГц), обладающих рекордным быстродействием (50 пс) и высокой чувствительностью (до 5x 10^(-14) Вт/Гц^(1/2)), а также однофотонных приемных систем ближнего инфракрасного диапазона с квантовой эффективностью 25 %, уровнем темнового счета 10-1c., максимальной скоростью счета ~ 100 МГц и временным разрешением до 50 пс.
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Семенов, А. В. (2010). Проскальзывание фазы, поглощение электромагнитного излучения и формирование отклика в детекторах на основе узких полосок сверхпроводников. Ph.D. thesis, , .
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Симонов, Н. О., Флоря, И. Н., Корнеева, Ю. П., Корнеев, А. А., & Гольцман, Г. Н. (2018). Однофотонный отклик в тонких сверхпроводящих MoNx пленках. In Сборн. науч. труд. VII международн. конф. по фотонике и информац. опт. (pp. 408–409).
Abstract: Продемонстрирован однофотонный отклик, при токе близком к критическому, в MoNx сверхпроводящих полосках шириной 70-104 нм. MoNx детекторы, имеющие коэффициент диффузии D≈0.32 см2/с и время электрон-фононного взаимодействия ηe-ph≈300 пс, достигают квантовой эффективности QE≈20% на длине волны λ=1550 нм. Возможность реализации однофотонного детектора в данном материале, подтверждает существующую теорию вихревого механизма возникновения фотоотклика в узких сверхпроводящих полосках.
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Смирнов, К. В., Вахтомин, Ю. Б., Смирнов, А. В., Ожегов, Р. В., Пентин, И. В., Дивочий, А. В., et al. (2010). Приемники терагерцового и инфракрасного диапазонов, основанные на тонкопленочных сверхпроводниковых наноструктурах. Вестник НГУ. Серия: Физика, 5(4).
Abstract: В работе представлены результаты разработки и создания чувствительных и ультрабыстрых приемников, основанных на тонкопленочных сверхпроводниковых наноструктурах: болометрах на эффекте электронного разогрева (HEB – hot-electron bolometer) и детекторах одиночных фотонов видимого и инфракрасного диапазонов волн (SSPD – superconducting singe-photon detector). Представлены основные принципы работы сверхпроводниковых устройств, технология создания и конструкционные особенности приемников, их основные типы и характеристики. Достигнутые рекордные значения параметров приемных систем позволяют использовать созданные приборы при решении различных научно-исследовательских задач в ближнем, среднем и дальнем ИК диапазонах волн.
This work presents the results of the development and fabrication of sensitive and ultrafast detectorsbased on thin film superconducting nanostructures: hot-electron bolometers (HEBs) and visible and infrared superconducting singe photon detectors (SSPDs). The main operational principles of the superconducting devices are presentedas well as the technology of fabrication of the detectors and their main types and parameters. The achieved record parameters of the detectors allow application of the fabricated devices to solution of various research problems in the near, middle and far IR ranges.
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Чулкова, Г. М., Семёнов, А. В., Дивочий, А. В., & Тархов, М. А. (2011). Сверхпроводниковый однофотонный детектор с разрешением числа фотонов для систем дальней телекоммуникационной связи. Ж. радиоэлектрон., (12), 1–6.
Abstract: Рассмотрена возможность применения сверхпроводникового однофотонного детектора, разрешающего число фотонов, в качестве датчика приёмных модулей телекоммуникационных линий. Показано, что для достижения доли ошибочных битов на уровне 10-11 достаточно на два порядка меньшей мощности в оптическом импульсе, чем при использовании существующих приёмных модулей.
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Чулкова, Г. М., Семёнов, А. В., Тархов, М. А., Гольцман, Г. Н., Корнеев, А. А., & Смирнов, К. В. (2012). О возможности использования PNR-SNPD в системах телекоммуникационной связи. Преподаватель ХХI век, (2), 244–246.
Abstract: Рассмотрена возможность применения сверхпроводникового нанополоскового детектора, разрешающего число фотонов (Photon-Number Resolving Superconducting Nanowire Photon Detector, PNR-SNPD), в качестве датчика приёмных модулей телекоммуникационных линий. Оценена мощность оптического импульса, необходимая для достижения приемлемо низкой доли ошибочных битов.
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